Thick-Film Laser Trimming Principles, Techniques and Recommendations
نویسندگان
چکیده
منابع مشابه
Thick-film Lithography Using Laser Write
Major part of this work was carried out in Hsinchu. ABSTRACT Mask-making process using laser direct-write has been broadly applied in the microelectronics and the PC board industries. In this paper, we report the thick-film lithography of laser write mainly for the x-ray mask in the LIGA application. Several schemes of multiple writing are successfully demonstrated in terms of the sidewall stra...
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ژورنال
عنوان ژورنال: ElectroComponent Science and Technology
سال: 1981
ISSN: 0305-3091
DOI: 10.1155/apec.9.9